Process Automation in Semiconductor Manufacturing: Issues and Solutions
نویسندگان
چکیده
While the area of process automation in semiconductor manufacturing has many issues in common with process automation and enactment in business processes, the nature of the semiconductor manufacturing process introduces a number of challenging new issues. Among these issues is the need to not only automate the process but also to continuously control and optimize it. Furthermore the semantics of success/failure for a semiconductor manufacturing process are quite different from the typical binary success/failure of business processes. In this paper, the issues in process automation in semiconductor manufacturing are presented, and compared and contrasted with the issues in traditional workflow technology. We then describe a system, based on an active database management system, that we have developed for process automation in semiconductor manufacturing. We also discuss the approach of this system towards addressing the different issues in the automation of semiconductor manufacturing processes.
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